JPH0178030U - - Google Patents

Info

Publication number
JPH0178030U
JPH0178030U JP1987172811U JP17281187U JPH0178030U JP H0178030 U JPH0178030 U JP H0178030U JP 1987172811 U JP1987172811 U JP 1987172811U JP 17281187 U JP17281187 U JP 17281187U JP H0178030 U JPH0178030 U JP H0178030U
Authority
JP
Japan
Prior art keywords
substrate
substrate support
groove
cassette
substantially parallel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987172811U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987172811U priority Critical patent/JPH0178030U/ja
Publication of JPH0178030U publication Critical patent/JPH0178030U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
  • Mounting Of Printed Circuit Boards And The Like (AREA)
JP1987172811U 1987-11-11 1987-11-11 Pending JPH0178030U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987172811U JPH0178030U (en]) 1987-11-11 1987-11-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987172811U JPH0178030U (en]) 1987-11-11 1987-11-11

Publications (1)

Publication Number Publication Date
JPH0178030U true JPH0178030U (en]) 1989-05-25

Family

ID=31464761

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987172811U Pending JPH0178030U (en]) 1987-11-11 1987-11-11

Country Status (1)

Country Link
JP (1) JPH0178030U (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10231023A (ja) * 1997-02-24 1998-09-02 Matsushita Electric Ind Co Ltd 基板搬送方法および基板搬送カセット

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6145377B2 (en]) * 1980-08-28 1986-10-07 Mitsubishi Electric Corp

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6145377B2 (en]) * 1980-08-28 1986-10-07 Mitsubishi Electric Corp

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10231023A (ja) * 1997-02-24 1998-09-02 Matsushita Electric Ind Co Ltd 基板搬送方法および基板搬送カセット

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